Peer Review History: Wafer Thinning Process and Its Critical Manufacturability Requirements

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Specific Comment:

Average Peer review marks at initial stage: 7.95/10

Average Peer review marks at publication stage: 9.1/10

Peer Review History:

Stage 1 |Original Manuscript| File 1 | NA

Stage 2 | Peer review report_1 (Boyan Karapenev, Bulgaria)| File 1 | NA

Stage 2 | Peer review report_2 (Shigang Hu, China)| File 1 | NA

Stage 2 | Revised_MS_v1_and_Feedback_v1 | File 1 | File 2

Stage 3 | Comment_Editor_1_v1| File 1 | NA

Stage 3 | Revised_MS_v2_and_Feedback_v2| File 1 | NA

Stage 3 | Comment_Editor_2_v1 | File 1 | NA

Stage 3 | Revised_MS_v3_and_Feedback_v3 | File 1 | NA

Stage 3 | Comment_Editor_3_v1| File 1 | NA